Nitrogen bonding environments and local order in hydrogenated amorphous silicon nitride films studied by Raman spectroscopy

✍ Scribed by Bandet, J.; Despax, B.; Caumont, M.

• Book ID: 118020851
• Publisher: American Institute of Physics
• Year: 1999
• Tongue: English
• Weight: 365 KB
• Volume: 85
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.370604