Nitrogen and Silicon Co-Doping of Ge 2 Sb 2 Te 5 Thin Films for Improving Phase Change Memory Performance

✍ Scribed by Yan-Fei, Cai; Peng, Zhou; Yin-Yin, Lin; Ting-Ao, Tang; Liang-Yao, Chen; Jing, Li; Bao-Wei, Qiao; Yun-Feng, Lai; Jie, Feng; Bing-Chu, Cai; Bomy, Chen

• Book ID: 121880840
• Publisher: Institute of Physics
• Year: 2007
• Tongue: English
• Weight: 272 KB
• Volume: 24
• Category: Article
• ISSN: 0256-307X
• DOI: 10.1088/0256-307X/24/3/053