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Nitridation effect on sapphire surface polaritons

✍ Scribed by Novikova, N.N.; Vinogradov, E.A.; Yakovlev, V.A.; Malin, T.V.; Mansurov, V.G.; Zhuravlev, K.S.

Book ID: 120010360
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 420 KB
Volume: 227
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2013.02.037

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## Abstract We studied optimal sapphire nitridation conditions with ammonia for the metal‐organic vapor phase epitaxy of InN using in‐situ spectroscopic ellipsometry (SE). SE indicates the formation of a complete AlN‐containing layer on top of the sapphire surface during the first 45 s of nitridati