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Nickel: A very fast diffuser in silicon

โœ Scribed by Lindroos, J.; Fenning, D. P.; Backlund, D. J.; Verlage, E.; Gorgulla, A.; Estreicher, S. K.; Savin, H.; Buonassisi, T.


Book ID
120401255
Publisher
American Institute of Physics
Year
2013
Tongue
English
Weight
863 KB
Volume
113
Category
Article
ISSN
0021-8979

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