Intermixing between germanium and silicon thin films in the presence of a fast interstitial diffuser

✍ Scribed by C.S. Pai; E.D. Marshall; S.S. Lau; W.K. Chu

• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 340 KB
• Volume: 136
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(86)90106-9