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Next generation of Deep Trench Isolation for Smart Power technologies with 120 V high-voltage devices

✍ Scribed by R. Charavel; J. Roig; S. Mouhoubi; P. Gassot; F. Bauwens; P. Vanmeerbeek; B. Desoete; P. Moens; E. De Backer

Book ID: 108210897
Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 917 KB
Volume: 50
Category: Article
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2010.07.117

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