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New precursors for CVD copper metallization

✍ Scribed by John A.T. Norman; Melanie Perez; Stefan E. Schulz; Thomas Waechtler

Book ID: 104051998
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 866 KB
Volume: 85
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2008.05.036

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