Copper metallization based on direct-liquid-injection hot-wire CVD

✍ Scribed by G. Papadimitropoulos; D. Davazoglou

• Book ID: 104051603
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 723 KB
• Volume: 84
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2007.01.012