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Copper Films Deposited by Hot-Wire CVD and Direct Liquid Injection of CupraSelect

✍ Scribed by G. Papadimitropoulos; D. Davazoglou

Publisher: John Wiley and Sons
Year: 2007
Tongue: English
Weight: 554 KB
Volume: 13
Category: Article
ISSN: 0948-1907
DOI: 10.1002/cvde.200706621

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