✦ LIBER ✦

New etching process

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

New Tegal polysilicon etch process reduc

✍ Keith Holman 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 122 KB

An improved sputter-etching process

📂 Article 📅 1973 🏛 Elsevier Science 🌐 English ⚖ 73 KB

A solid-liquid-vapor etching process

✍ R.S. Wagner 📂 Article 📅 1968 🏛 Elsevier Science 🌐 English ⚖ 496 KB

Hydrogen in Dry Etching Processes

✍ Franz, G. 📂 Article 📅 1997 🏛 John Wiley and Sons 🌐 English ⚖ 376 KB

Indirect laser etching of fused silica:

✍ R. Böhme; K. Zimmer 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 905 KB

Modelling of aluminium plasma etch proce

✍ Paul M.F. Colson 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 215 KB