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New etching process for device fabrication using diamond

✍ Scribed by Hwang, D.S.; Saito, T.; Fujimori, N.

Book ID: 123234000
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 246 KB
Volume: 13
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2004.07.020

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