Atomic layer etching of graphene for full graphene device fabrication

✍ Scribed by Woong Sun Lim; Yi Yeon Kim; Hyeongkeun Kim; Sukjae Jang; Namyong Kwon; Beyoung Jae Park; Jong-Hyun Ahn; Ilsub Chung; Byung Hee Hong; Geun Young Yeom

• Book ID: 113514377
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 984 KB
• Volume: 50
• Category: Article
• ISSN: 0008-6223
• DOI: 10.1016/j.carbon.2011.08.058