New photocurable composition for ISFET p
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Sergey S. Levichev; Andrey V. Bratov; Yuri G. Vlasov
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Article
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1994
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Elsevier Science
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English
β 368 KB
A new ion-selective membrane composition for an ISFET based on mono-and bifunctional methacrylates is developed; the membrane can be deposited and photolithographically structured on a wafer containing the ISFETs. Compatibility of the polymer matrix with various plasticizers commonly used in PVGbase