New photocurable composition for ISFET polymer membranes

✍ Scribed by Sergey S. Levichev; Andrey V. Bratov; Yuri G. Vlasov

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 368 KB
• Volume: 19
• Category: Article
• ISSN: 0925-4005
• DOI: 10.1016/0925-4005(93)01225-s

✦ Synopsis

A new ion-selective membrane composition for an ISFET based on mono-and bifunctional methacrylates is developed; the membrane can be deposited and photolithographically structured on a wafer containing the ISFETs. Compatibility of the polymer matrix with various plasticizers commonly used in PVGbased ion-selective membrane formulations is established and it is shown that the membrane may hold up to 45% of different plasticizers. The characteristics of a calcium-sensitive ISFET with the developed membrane are presented and the applicability of the photocurable polymer for potassium-sensitive membrane formation is shown.