✦ LIBER ✦
New technology for easy and fully IC-compatible fabrication of backside-contacted ISFETs
✍ Scribed by A. Merlos; E. Cabruja; J. Esteve
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 464 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0925-4005
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