✦ LIBER ✦

Negative tone chemically amplified resist formulation optimizations for ultra high-resolution lithography

✍ Scribed by J. Saint-Pol; S. Landis; C. Gourgon; S. Tedesco; R. Hanawa; M. Suetsugu; M. Akita; S. Yamamoto

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Negative-tone chemically-amplified resis

✍ S. Landis; S. Pauliac; R. Hanawa; M. Suetsugu; M. Akita 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 289 KB

Negative-tone high-resolution photocatal

✍ R. Dammel; K.-F. Dössel; J. Lingnau; J. Theis; H. Huber; H. Oertel; J. Trube 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 914 KB