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Near–Room Temperature Thermal CVD of SiO2 Films

✍ Scribed by Jay J. Senkevich; Seshu B. Desu

Publisher: John Wiley and Sons
Year: 1998
Tongue: English
Weight: 171 KB
Volume: 04
Category: Article
ISSN: 0948-1907
DOI: 10.1002/(sici)1521-3862(199805)04:03<92::aid-cvde92>3.0.co;2-c

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