ChemInform Abstract: Near-Room Temperature Thermal CVD of SiO2 Films.

✍ Scribed by J. J. SENKEVICH; S. B. DESU

• Publisher: John Wiley and Sons
• Year: 2010
• Weight: 30 KB
• Volume: 29
• Category: Article
• ISSN: 0931-7597
• DOI: 10.1002/chin.199829336

✦ Synopsis

Abstract

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