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N+BF2and N+C+BF2high-dose co-implantation in silicon

✍ Scribed by L. Barbadillo; M. Cervera; M.J. Hernández; P. Rodríguez; J. Piqueras; S.I. Molina; A. Ponce; F.M. Morales

No coin nor oath required. For personal study only.

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