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Crystalline Inclusions Formed in C+N+BF 2 Coimplanted on Silicon (111)

✍ Scribed by Ponce, Arturo ;Morales, Francisco M. ;Molina, Sergio I. ;Barbadillo, Luc�a ;Cervera, Manuel ;Hern�ndez, Mar� J. ;Rodr�guez, Pedro ;Piqueras, Juan

Book ID: 106196323
Publisher: Springer-Verlag
Year: 2004
Weight: 200 KB
Volume: 145
Category: Article
ISSN: 0344-838X
DOI: 10.1007/s00604-003-0147-5

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