✦ LIBER ✦

Nanostructure formation of SiC using ion implantation and CMP

✍ Scribed by O. Eryu; K. Abe; N. Takemoto

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Formation of Si/SiC multilayers by low-e

✍ S. Dobrovolskiy; A.E. Yakshin; F.D. Tichelaar; J. Verhoeven; E. Louis; F. Bijker 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 846 KB

Effect of Al and Be ions pre-implantatio

✍ T. Taguchi; N. Igawa; E. Wakai; S. Jitsukawa; L.L. Snead; A. Hasegawa 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 557 KB

Detailed analysis of β-SiC formation by

✍ A. Romano-Rodriguez; C. Serre; L. Calvo-Barrio; A. Pérez-Rodríguez; J.R. Morante 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 310 KB

Formation of optically-active, metal sil

✍ L.J. Mitchell; O.W. Holland; K. Hossain; E.B. Smith; T.D. Golden; J.L. Duggan; F 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 198 KB

Characterization of Crystallinity of SiC

✍ Theodossiu, E. ;Baumann, H. ;Klimenkov, M. ;Matz, W. ;Bethge, K. 📂 Article 📅 2000 🏛 John Wiley and Sons 🌐 English ⚖ 189 KB 👁 2 views

Diffusion of 13C and 29Si implanted ions

✍ P. Eveno; J. Li; A.M. Huntz; J. Chaumont 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 502 KB