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Formation of optically-active, metal silicides using ion implantation and/or oxidation

✍ Scribed by L.J. Mitchell; O.W. Holland; K. Hossain; E.B. Smith; T.D. Golden; J.L. Duggan; F.D. McDaniel


Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
198 KB
Volume
241
Category
Article
ISSN
0168-583X

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