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Nanostructure formation by O 2+ ion sputtering of Si/SiGe heterostructures

✍ Scribed by Lau, G S; Tok, E S; Liu, R; Wee, A T S; Tjiu, W C; Zhang, J

Book ID: 120269638
Publisher: Institute of Physics
Year: 2003
Tongue: English
Weight: 290 KB
Volume: 14
Category: Article
ISSN: 0957-4484
DOI: 10.1088/0957-4484/14/11/005

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