Formation of ternary Co1 − xPdxSi2 on Si (100) by Pd ion implantation in CoSi2/Si (100) heterostructures

✍ Scribed by U. Tisch; B. Holländer; M. Hacke; St. Mesters; W. Michelsen; D. Guggi; S. Mantl; B. Kabius

• Book ID: 114168818
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 419 KB
• Volume: 127-128
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(96)00949-4