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Nanoscale radiative striations of sol-gel-derived spin-coating films

โœ Scribed by H Kozuka; S Takenaka; S Kimura


Book ID
114386451
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
257 KB
Volume
44
Category
Article
ISSN
1359-6462

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Spin coating process of sol-gel silicate
โœ Konstantin Vorotilov; Vladimir Petrovsky; Vladimir Vasiljev ๐Ÿ“‚ Article ๐Ÿ“… 1995 ๐Ÿ› Springer ๐ŸŒ English โš– 1004 KB

The effect of two factors having the most important influence on spin coating process of sol-gel films: the spin speed and the temperature (of the substrate and the applied solution) during film deposition is discussed. It is shown, that film thickness and thickness uniformity are determined by cent