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Nanoscale metal-silicide films prepared by surfactant sputtering and analyzed by RBS

✍ Scribed by K. Zhang; H. Hofsäss; H. Zutz

Book ID: 103863914
Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 519 KB
Volume: 268
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2010.02.110

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