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Nanoscale experimental study of a micro-crack in silicon

โœ Scribed by C.W. Zhao; Y.M. Xing

Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
571 KB
Volume
403
Category
Article
ISSN
0921-4526

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โœฆ Synopsis

A micro-crack in silicon was experimentally investigated using high-resolution transmission electron microscopy (HRTEM). The crystal lattice structure of a micro-crack was carefully observed at a HRTEM image scale of approximately 18 nm. The crystal lattice structure of the crack tip region was observed to be regular with good periodicity. The HRTEM images of the micro-crack demonstrate that the microcrack cleavage expands along two crystal planes, where the principal cleavage plane is the (111) crystal plane.

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