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Experimental procedure in HREM studies of polysilicon-silicon interfaces

✍ Scribed by A. Albu-Yaron; J.C. Barry; C.R. Booker

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 103 KB
Volume: 14
Category: Article
ISSN: 0304-3991
DOI: 10.1016/0304-3991(84)90228-6

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