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Nanoscale epitaxial growth control of oxide thin films by laser molecular beam epitaxy—towards oxide nanoelectronics

✍ Scribed by Mamoru Yoshimoto; Atsushi Sasaki; Shusaku Akiba


Book ID
108275694
Publisher
Institute of Physics and National Institute of Materials Science
Year
2004
Tongue
English
Weight
297 KB
Volume
5
Category
Article
ISSN
1468-6996

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Fabrication of atomically defined oxide
✍ H. Koinuma; T. Ohnishi; T. Maeda; M.B. Lee; M. Kawasaki; M. Yoshimoto 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 337 KB

Laser molecular beam epitaxy (MBE) has been verified to be a tool especially useful for fabricating epitaxial oxide films with atmically defined interface and thickness. We report here two cases of laser MBE applied successfully to heteroepitaxial growths of oxide films on Si; dielectric BaTiO 3 fil