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Nanoscale enrichments of substrate elements in the growth of thin oxide films

โœ Scribed by H. Habazaki; K. Shimizu; P. Skeldon; G.E. Thompson; G.C. wood; X. Zhou


Book ID
117087309
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
523 KB
Volume
39
Category
Article
ISSN
0010-938X

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The growth and characterization of zirconium oxide (ZrO 2 ) thin films prepared by thermal oxidation of a deposited Zr metal layer on SiO 2 /Si were investigated. Uniform ZrO 2 thin film with smooth surface morphology was obtained. The thermal ZrO 2 films showed a polycrystalline structure. The diel