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Nanorobotic Strategies for Handling and Characterization of Metal-Assisted Etched Silicon Nanowires

✍ Scribed by Stolle, Christian; Bartenwerfer, Malte; Celle, Caroline; Simonato, Jean-Pierre; Fatikow, Sergej

Book ID
118269788
Publisher
IEEE
Year
2013
Tongue
English
Weight
881 KB
Volume
18
Category
Article
ISSN
1083-4435

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## Abstract Silicon nanowires (SiNWs) and nanopillars have been obtained by metal‐assisted etching (MAE), starting from silver thin films deposited by thermal evaporation and sputtering on silicon substrates. Different deposition methods and thickness are strongly affecting spatial distribution and