Nanometer movement and nanometer metrology-A review of realization methods: Hong Wei; Davis, E. J.; Stout, K. J. SPIE — Second International Symposium on Measurement Technology and Intelligent Instruments; 1929 Oct 5; Wuhan, China. Bellingham, WA: Society of Photo-Optical Instrumentation Engineers; 1993: 876–885

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 142 KB
• Volume: 16
• Category: Article
• ISSN: 0141-6359
• DOI: 10.1016/0141-6359(94)90163-5