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Nanoindentation and AFM studies of PECVD DLC and reactively sputtered Ti containing carbon films

✍ Scribed by A. Pauschitz; J. Schalko; T. Koch; C. Eisenmenger-Sittner; S. Kvasnica; Manish Roy


Book ID
110638268
Publisher
Springer-Verlag
Year
2003
Tongue
English
Weight
555 KB
Volume
26
Category
Article
ISSN
0250-4707

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