✦ LIBER ✦
Study of carbon and oxygen incorporation in reactively sputtered Cr-Si-Al films using ERDA
✍ Scribed by C. Neelmeijer; R. Grötzschel; R. Klabes; U. Kreissig; G. Sobe
- Book ID
- 113282978
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 352 KB
- Volume
- 64
- Category
- Article
- ISSN
- 0168-583X
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