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Characteristics of DLC containing Ti and Zr films deposited by reactive magnetron sputtering

✍ Scribed by Guojia Ma; Guoqiang Lin; Gang Sun; Huafang Zhang; Hongchen Wu

Book ID: 113846516
Publisher: Elsevier
Year: 2011
Tongue: English
Weight: 362 KB
Volume: 18
Category: Article
ISSN: 1875-3892
DOI: 10.1016/j.phpro.2011.06.049

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