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Nanoimprint Lithography for Nanophotonics in Silicon

✍ Scribed by Bruinink, Christiaan M.; Burresi, Matteo; de Boer, Meint J.; Segerink, Frans B.; Jansen, Henri V.; Berenschot, E.; Reinhoudt, David N.; Huskens, Jurriaan; Kuipers, L.

Book ID
126837302
Publisher
American Chemical Society
Year
2008
Tongue
English
Weight
884 KB
Volume
8
Category
Article
ISSN
1530-6984

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