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Nanoimprint Lithography for Honeycomb Texturing of Multicrystalline Silicon

✍ Scribed by H. Hauser; B. Michl; V. Kübler; S. Schwarzkopf; C. Müller; M. Hermle; B. Bläsi

Book ID: 116425669
Publisher: Elsevier
Year: 2011
Weight: 862 KB
Volume: 8
Category: Article
ISSN: 1876-6102
DOI: 10.1016/j.egypro.2011.06.196

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## Abstract Taking advantage of the electrochemical formation of macropores in aqueous HF under illumination, we have developed an efficient photoelectrochemical (PEC) texturization on n‐type multicrystalline Si (mc‐Si) wafers which leads to a decrease in the reflectivity of solar cells. An optimiz