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Nanocrystalline silicon thin films prepared by radiofrequency magnetron sputtering

✍ Scribed by C. Gonçalves; S. Charvet; A. Zeinert; M. Clin; K. Zellama


Book ID
114085397
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
150 KB
Volume
403-404
Category
Article
ISSN
0040-6090

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