Impurities and related microstructure in nanocrystalline silicon films grown by radiofrequency magnetron sputtering

✍ Scribed by C. Gonçalves; A. Zeinert; S. Charvet; M. Lejeune; A. Grosman; H.-J. von Bardeleben; K. Zellama

• Book ID: 113936523
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 183 KB
• Volume: 451-452
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2003.11.015