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Nanocomposite TiC/a–C:H hard coatings deposited by reactive PVD

✍ Scribed by Thomas Zehnder; Jörg Patscheider


Book ID
108422793
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
199 KB
Volume
133-134
Category
Article
ISSN
0257-8972

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✍ A.A. El Mel; B. Angleraud; E. Gautron; A. Granier; P.Y. Tessier 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 441 KB

Titanium containing amorphous carbon (TiC/a-C:H) films were deposited by a hybrid IPVD/PECVD (Ionized Physical Vapor Deposition/Plasma Enhanced Chemical Vapor Deposition) process combining titanium target magnetron sputtering and PECVD in an Ar-CH 4 plasma. Films with various carbon contents have be