Nanochannel system fabricated by MEMS microfabrication and atomic force microscopy
โ Scribed by Wang, Z.; Wang, D.; Jiao, N.; Tung, S.; Dong, Z.
- Book ID
- 114444477
- Publisher
- The Institution of Engineering and Technology
- Year
- 2011
- Tongue
- English
- Weight
- 373 KB
- Volume
- 5
- Category
- Article
- ISSN
- 1751-8741
No coin nor oath required. For personal study only.
๐ SIMILAR VOLUMES
## Abstract Local nanoโoxidation has been used to write oxide lines on hydrogenโpassivated silicon surfaces by atomic force microscopy. The experimental results suggest that the temperature and humidity have considerable influence on the dimension of asโgrown oxide lines. It is concluded that the s
In this paper results concerning optical analysis of the SiO 2 =Si system performed by the combined ellipsometric and reflectometric method used in multiple-sample modification will be presented. This method is based on combining both the single-wavelength method and the dispersion method. Three mod