✦ LIBER ✦

Humidity and temperature dependences of oxide lines fabricated by atomic force microscopy based nanolithography

✍ Scribed by Ai, F. ;Wang, J. C. ;Luo, L. ;Liu, Y. ;Zhou, Y. F. ;Pan, Z. L.

Book ID: 105363267
Publisher: John Wiley and Sons
Year: 2005
Tongue: English
Weight: 348 KB
Volume: 202
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.200520039

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✦ Synopsis

Abstract

Local nano‐oxidation has been used to write oxide lines on hydrogen‐passivated silicon surfaces by atomic force microscopy. The experimental results suggest that the temperature and humidity have considerable influence on the dimension of as‐grown oxide lines. It is concluded that the size of oxide lines (width and height) increase following the increase of relative humidity or the decrease of temperature of substrate, these can be explained by the variation of the amount of absorbed water layer on the sample surface under different parameters. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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