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Nano-photomask fabrication using focused ion beam direct writing

✍ Scribed by F.Z. Fang; Z.W. Xu; X.T. Hu; C.T. Wang; X.G. Luo; Y.Q. Fu

Book ID: 108095001
Publisher: International Academy for Production Engineering
Year: 2010
Tongue: English
Weight: 989 KB
Volume: 59
Category: Article
ISSN: 0007-8506
DOI: 10.1016/j.cirp.2010.03.038

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