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N2(SiCl3)4 — A Tetrakissilylhydrazine as an Unexpected Product of the Reaction Between N2 and SiCl4.

✍ Scribed by Nils Schiefenhoevel; Hans-Joerg Himmel; Michael Binnewies

Publisher
John Wiley and Sons
Year
2004
Weight
66 KB
Volume
35
Category
Article
ISSN
0931-7597

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Identification and Characterization of M
Identification and Characterization of Monomeric, Volatile SiCl3NH2 as Product of the Reaction between SiCl4 and NH3: An Important Intermediate on the Way to Silicon Nitride?
✍ Hans-Jörg Himmel; Nils Schiefenhövel; Michael Binnewies 📂 Article 📅 2003 🏛 John Wiley and Sons 🌐 English ⚖ 150 KB 👁 2 views

## Abstract We studied the reaction of SiCl~4~ with NH~3~ by mass spectrometry and IR spectroscopy. By means of mass spectrometry, SiCl~3~NH~2~ was for the first time identified as an intermediate generated in significant amounts in the course of the reaction. In additional experiments, SiCl~3~NH~2