Identification and Characterization of Monomeric, Volatile SiCl3NH2 as Product of the Reaction between SiCl4 and NH3: An Important Intermediate on the Way to Silicon Nitride?

✍ Scribed by Hans-Jörg Himmel; Nils Schiefenhövel; Michael Binnewies

• Publisher: John Wiley and Sons
• Year: 2003
• Tongue: English
• Weight: 150 KB
• Volume: 9
• Category: Article
• ISSN: 0947-6539
• DOI: 10.1002/chem.200390158

✦ Synopsis

Abstract

We studied the reaction of SiCl~4~ with NH~3~ by mass spectrometry and IR spectroscopy. By means of mass spectrometry, SiCl~3~NH~2~ was for the first time identified as an intermediate generated in significant amounts in the course of the reaction. In additional experiments, SiCl~3~NH~2~ was formed as a stable gaseous product of the ammonolysis of SiCl~4~, and the product was identified and characterized in detail by IR spectroscopic methods (gas phase and matrix isolation) in combination with quantum‐chemical calculations. The calculations also gave access to important thermodynamical data.