Identification and Characterization of Monomeric, Volatile SiCl3NH2 as Product of the Reaction Between SiCl4 and NH3: An Important Intermediate on the Way to Silicon Nitride?

Identification and Characterization of M

Identification and Characterization of Monomeric, Volatile SiCl3NH2 as Product of the Reaction between SiCl4 and NH3: An Important Intermediate on the Way to Silicon Nitride?

✍ Hans-Jörg Himmel; Nils Schiefenhövel; Michael Binnewies 📂 Article 📅 2003 🏛 John Wiley and Sons 🌐 English ⚖ 150 KB 👁 1 views

## Abstract We studied the reaction of SiCl~4~ with NH~3~ by mass spectrometry and IR spectroscopy. By means of mass spectrometry, SiCl~3~NH~2~ was for the first time identified as an intermediate generated in significant amounts in the course of the reaction. In additional experiments, SiCl~3~NH~2

Identification and Characterization of Monomeric, Volatile SiCl3NH2 as Product of the Reaction Between SiCl4 and NH3: An Important Intermediate on the Way to Silicon Nitride?

✦ Synopsis

Abstract