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N2 decomposition by hot wire and N2 post-deposition treatment on hydrogenated microcrystalline silicon thin films

✍ Scribed by Koji Mazaki; Akimori Tabata; Akihiko Kitagawa; Akihiro Kondo

Book ID: 108290361
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 874 KB
Volume: 517
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2009.01.041

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