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Effect of hot-wire passivation on the properties of hydrogenated microcrystalline silicon films to reduce post-deposition oxidation

โœ Scribed by S. Mitsuhashi; A. Tabata; T. Mizutani

Book ID
116669636
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
164 KB
Volume
352
Category
Article
ISSN
0022-3093

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