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N-type doping of BaSi2 epitaxial films by phosphorus ion implantation and thermal annealing

✍ Scribed by Hara, Kosuke O.; Hoshi, Yusuke; Usami, Noritaka; Shiraki, Yasuhiro; Nakamura, Kotaro; Toko, Kaoru; Suemasu, Takashi

No coin nor oath required. For personal study only.

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