Phosphorus ion implantation and annealing induced n-type conductivity and microstructure evolution in ultrananocrystalline diamond films

✍ Scribed by Hu, X. J.; Ye, J. S.; Hu, H.; Chen, X. H.; Shen, Y. G.

• Book ID: 120208007
• Publisher: American Institute of Physics
• Year: 2011
• Tongue: English
• Weight: 450 KB
• Volume: 99
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.3641458